This paper presents a highly sensitive thermoelectric sensor for catalytic combustible gas detection. The sensor contains two low-stress (+176 MPa) membranes of a combination of stoichiometric and silicon-rich silicon nitride that makes them chemically and thermally stable. The complete fabrication process with details. especially the challenges and their solutions. https://www.roneverhart.com/Dudley-ASA-Thunder-ZN-Hycon-12-52-300-Softballs-4A-068Y/